Piezoelectric Sensor: Design, Components and Benefits
Abstract
Full Text:
PDFReferences
H. H. Nassif, M. Gindy, and J. Davis, “Comparison of laser Doppler vibrometer with contact
sensors for monitoring bridge deflection and vibration,” NDT&E International, vol. 38, no. 3, pp.
–218, 2005.
M. Tilli, T. Motooka, V.-M. Airaksinen, S. Franssila, M. Paulasto-Krockel, and V. Lindroos,
Handbook of Silicon Based MEMS Materials and Technologies. Elsevier, 2nd Edition, 2015
R. de Reus, J. O. Gulløv, and P. R. Scheeper, “Fabrication and characterization of a piezoelectric
accelerometer,” Journal of Micromechanical Microengineering, vol. 9, no. 2, pp. 123–126, 1999.
Bahareh Yaghootkar, Soheil Azimi, and Behraad Bahreyni. A High-Performance Piezoelectric
Vibration Sensor, IEEE.17(13): 4005 – 4012, 2017.
S. D. Senturia. Microsystem Design. Boston, MA, USA: Kluwer Academic Publishers, 2000.
L. P. Wang, K. Deng, L. Zou, R. Wolf, R. J. Davis, and S. Trolier-McKinstry. “Microelectro
mechanical systems (MEMS) accelerometers using lead zirconate titanate thick films,” IEEE
Electron Device Letters, vol. 23, no. 4, pp. 182–184,2002.
K. E. Speller and D. Yu, “A low-noise MEMS accelerometer for unattended ground sensor
applications,” Proceedings of SPIE, vol. 5417, pp. 63–72, 2014
Refbacks
- There are currently no refbacks.